Activités Scientifiques
Activités Scientifiques
DEUTSCH 

ENGLISH 

Semiconductor Technology

 Purpose

  • Compact power electronics for (hybrid) electric vehicles
  • Evaluation of semiconductor devices specially designed for pulsed power applications
  • Development of silicon carbide (SiC) thyristors with high power density.

Skills

  • Power semiconductor device physics
  • Power semiconductor device fabrication technology
  • Power semiconductor device characterization.

Results

SiC thyristors attain the following characteristics:

  • Maximum blocking voltage of 4 kV
  • On-state voltage of 3.9 V (at 100 A/cm2)
  • Current capability of 2 A (350 A/cm2)
  • Turn-on/off time of 210 ns /1 μs
  • Reverse recovery time of 400 ns.

Facilities

  • Clean room with photolithography
  • Metal evaporation tools
  • Inspection microscope, surface profiler,
    SEM, etc.
  • High/low-temperature and vacuum probing
  • High-voltage test bench.

Electrical characterization on chip-level
 
SiC wafer with test structures



SiC thyristor dies


Clean room with mask aligner
 
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